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          Diameter your location:主頁 > 英文版 > Silicon wafer > Diameter >

          300mm

          add time:2017-11-21 14:39 Browse source:未知


          FSM carries a full line of 300mm wafers. Please see below a SEMI standard specification for prime and test grade wafers. Every customer's specification is unique and FSM can supply wafers that meet your exact specifications.
          If you do not see the specification you require, please CONTACT FSM to speak with a member of our experienced and knowledgeable sales staff.

          Diameter 300 +/- 0.5 mm 300 +/- 0.2 mm
          Type / Dopant P/Boron P/Boron
          Orientation <100> +/- 1º <100> +/- 1º
          Grade Test Prime
          Resistivity 1 - 50 Ω-cm 15 - 20 Ω-cm
          Radial Resisivity Gradient As Specified
          Oxygen As Specified
          Carbon As Specified
          Metals < 5 x E10 atoms/cm2  < 1 x E10 atoms/cm2
          Thickness 775 +/- 25 μm 775 +/- 15 μm
          TTV <= 5 μm <= 2 μm
          Bow / Warp <= 50 μm <= 40 μm
          STIR As Specified

          Flats

          Standard

          SEMI Standard
          Particle Count <= 50 @ >= 0.16μm <= 50 @ >= 0.12 to 0.065 μm
           Front Side Polished  Polished
           Back Side  Polished  Polished

          * N type wafers available

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